To obtain materials with the help of RF-plasma treatment at low pressure
【摘要】:正The paper discusses the feasibility and characteristics of radio frequency(RF) plasma at low pressures used at the present time in order to produce new materials such as nanocomposites,sorbents,rare-earth metals, fiber-reinforced composites and et al.
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唐中强;陈再良;;Plasma清洁工艺研究[J];苏州大学学报(工科版);2008年03期 |
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