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FABRICATION TECHNOLOGY AND PROPERTIES OF RARE EARTH GIANT MAGNETOSTRICTIVE FILMS BASED ON MSAW APPLICATION

【摘要】:正Rare earth giant magnetostrictive thin films(RGMFs) belong to a new type of electro(magnetic) -mechanical conversion functional materials.Such materials have broad application prospects in magnetic surface acoustic wave(MSAW) devices.In this paper,RGMFs samples are fabricated by ion beam sputtering deposition(IBSD).In order to improve the magnetic sensitivity,films after forming are heat-treated at different temperatures in vacuum condition.RGMFs magnetic hysteresis loops and static magnetostriction characteristics are measured by DWS type ultra precision displacement meter and Alternating Gradient Magnetometer respectively.For the purpose of developing better functional thin films aimed at MSAW devices,preparation technology and effect on static-dynamic magnetostriction characteristics of RGMFs samples by vacuum annealing treatment are primary studied.The results indicate that static-dynamic magnetostrictive characteristics of RGMFs are closely related to factors such as preparation technology, sputtering position,and vacuum sensitivity enhancing technology,etc.

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