Holographic femtosecond laser processing by use of a liquid crystal spatial light modulator
【摘要】：Parallel femtosecond laser processing using a computer-generated hologram displayed on a spatial light modulator is demonstrated. The use of a spatial light modulator enables to perform an arbitrary and variable patterning. This holographic femtosecond laser processing has advantages of high-speed and high light-use efficiency. A critical issue is to precisely control the intensities of the diffraction peaks of the computer-generated hologram. We demonstrated some methods for the control of diffraction peak intensity. We also demonstrate the laser processing with two-dimensional and three-dimensional parallelism using the Fourier hologram.
【作者单位】：Department of Optical Science and Technology,Faculty of Engineering The University of Tokushima 2-1 Minamijosanjima-cho,Tokushima 770-8506,Japan